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International Journal of Science, Strategic Management and Technology

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ISSN: 3108-1762 (Online)
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AI-DRIVEN INTELLIGENT SEMICONDUCTOR MANUFACTURING FRAMEWORK FOR PROCESS OPTIMIZATION, PREDICTIVE MAINTENANCE, AND DEFECT DETECTION

AUTHORS:
Bandla Hansika
Medipelli Aravind
Mentor
N Swaroop
Affiliation
Department Of ECE, SVS Group of Institutions, Hanmakonda, Telangana
CC BY 4.0 License:
This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract
Semiconductor manufacturing is becoming increasingly complex due to the continuous scaling of device dimensions, stringent quality requirements, and the demand for high production efficiency. Traditional manufacturing approaches often face challenges related to process variability, equipment failures, defect detection, and yield optimization, limiting their ability to meet the requirements of next-generation integrated circuits. Artificial Intelligence (AI) has emerged as a transformative technology that enables intelligent automation, predictive analytics, and real-time decision-making throughout semiconductor fabrication processes. This paper presents an AI-driven semiconductor manufacturing framework that integrates machine learning, deep learning, computer vision, edge computing, Industrial Internet of Things (IIoT), and digital twin technologies to enhance wafer fabrication, process monitoring, equipment maintenance, and quality inspection. The proposed framework employs deep neural networks for defect classification, reinforcement learning for adaptive process optimization, predictive maintenance models for equipment health monitoring, and digital twins for virtual process simulation and continuous optimization. Furthermore, AI-enabled analytics facilitate anomaly detection, resource allocation, and production scheduling while reducing manufacturing costs and energy consumption. The integration of explainable AI techniques improves transparency and supports informed decision-making in high-precision fabrication environments. The proposed approach is expected to improve manufacturing yield, reduce defect rates, minimize equipment downtime, optimize resource utilization, and enhance overall production efficiency, thereby supporting the development of intelligent, resilient, and sustainable semiconductor manufacturing systems aligned with Industry 4.0 and smart factory initiatives.

 
Keywords
Keywords— Artificial Intelligence (AI) Semiconductor Manufacturing Machine Learning Deep Learning Industrial Internet of Things (IIoT) Digital Twin Predictive Maintenance Defect Detection Process Optimization Smart Manufacturing Computer Vision Industry 4.0.
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Hansika, B. & Aravind, M. (2026). AI-Driven Intelligent Semiconductor Manufacturing Framework for Process Optimization, Predictive Maintenance, and Defect Detection. International Journal of Science, Strategic Management and Technology, 02(7), 1-9. https://doi.org/10.55041/ijsmt.v2i7.100

Hansika, Bandla, and Medipelli Aravind. "AI-Driven Intelligent Semiconductor Manufacturing Framework for Process Optimization, Predictive Maintenance, and Defect Detection." International Journal of Science, Strategic Management and Technology, vol. 02, no. 7, 2026, pp. 1-9. doi:https://doi.org/10.55041/ijsmt.v2i7.100.

Hansika, Bandla, and Medipelli Aravind. "AI-Driven Intelligent Semiconductor Manufacturing Framework for Process Optimization, Predictive Maintenance, and Defect Detection." International Journal of Science, Strategic Management and Technology 02, no. 7 (2026): 1-9. https://doi.org/https://doi.org/10.55041/ijsmt.v2i7.100.

References

  1. Sheikh, A., & Chong, E. K. (2025). Artificial intelligence-driven optimization for three-dimensional integrated circuit manufacturing: A system of systems framework. IEEE Transactions on Components, Packaging and Manufacturing Technology.

  2. Ghelani, H. (2024). Advanced AI technologies for defect prevention and yield optimization in PCB manufacturing. International Journal Of Engineering And Computer Science13(10).

  3. Das, R. S. (2023). Advancements in AI-Driven Optimisation for Enhancing Semiconductor Manufacturing Processes: An Exploratory Study. Journal of Scientific and Engineering Research10(12), 148-156.

  4. Dai, C., Xie, X., Wen, K., Xing, Z., & Ye, H. (2026). Applications of Artificial Intelligence in Semiconductor Defect Detection and Process Control: Methods, Progress, and Prospects. In International Conference of Electrical, Electronic and Networked Energy Systems(pp. 302-309). Springer, Singapore.

  5. Potdar, M., & Dharani, A. (2026). A CRITICAL SYNTHESIS OF ARTIFICIAL INTELLIGENCE TECHNIQUES FOR PREDICTIVE MAINTENANCE AND ANOMALY DETECTION IN COMPLEX CHIP MANUFACTURING. Scientific Culture12(5 Part 1), 696.

  6. Hafiz, M. I. A. H., Azmi, E. D. S. K., Azlie, M. I. N. N., Zaki, M. H., Mazilan, M. A. H., Mazuki, M. S. M., ... & Khamis, N. K. (2025). Application of artificial intelligence in electronics and semiconductor industries.  Kejuruter37, 3245-3253.

  7. Nandra, R., & Nandra, N. (2026, March). Enhancing Sustainability in Semiconductor Manufacturing through AI-Driven Predictive Maintenance: A Hybrid Machine Learning-Fuzzy Logic Approach. In 2026 Innovations in Machine, Engineering, and Digital Conference (IMED)(pp. 1-7). IEEE.

  8. Palsaniya, R. C. (2025, October). AI-Driven Machine Learning for Enhancing Nanomanufacturing Equipment Output. In 2025 IEEE 20th Nanotechnology Materials and Devices Conference (NMDC)(pp. 237-242). IEEE.

  9. Shailaja, P., Kumar, K. K., Sirnivas, K., Reddy, V. B. S., Lakshmi, K. M., & Rajani, D. (2024, September). AI-Driven Semiconductor Manufacturing via IC Failure Prediction: Cost-Effective Strategies for Process Improvement. In 2024 International Conference on Distributed Systems, Computer Networks and Cybersecurity (ICDSCNC)(pp. 1-6). IEEE.

  10. Mehta, V. H. (2021). The Future of Manufacturing: AI-Powered Adaptive Intelligent Applications to Repatriate Critical Manufacturing Industries such as Semiconductor to the US. Available at SSRN 4940262.

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✓ All ethical standards met
This article has undergone plagiarism screening and double-blind peer review. Editorial policies have been followed. Authors retain copyright under CC BY-NC 4.0 license. The research complies with ethical standards and institutional guidelines.
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